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AUSSL
has several standard and specialty surface science techniques
that address a variety of surface and thin film phenomena.
Three Kratos XSAM 800 surface analytical systems
with Auger electron spectroscopy (AES), X-ray photoelectron
spectroscopy (XPS) and ion scattering (ISS) enables the study
of interfaces with sub-monolayer sensitivity. The
dynamics of surface chemical reactions is probed by scanning
kinetic spectroscopy (SKS), thermal desorption techniques
(TPD), and electron-stimulated desorption (ESD).
Rutherford backscattering spectroscopy (RBS) and light
ion channeling enable non-destructive and quantitative
materials analysis of layered
materials.
Characterization of transport properties and
microstructures is carried out by optical (Nomarski and
stereo) microscopy and scanning electron microscopy (SEM),
Hall effect equipment, current-voltage (I-V), and
capacitance-voltage (CV)
measurements.
Photolithography and thin film deposition
equipment enable the manufacture of circuit test structures,
ohmic, and Schottky barrier contacts.
Our chemical vapor deposition
system has a low-pressure, vertical reactor design with a 15kW
RF induction power supply that can heat a substrate up to 1800
C. The reactor is used to grow epitaxial wide-bandgap
semiconductors and has the capability to handle both liquid
and gas metallorganic precursors.
A brief description of our major
techniques . . .














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